KALISPELL, USA: ClassOne Technology announced a five-unit order for its next generation of batch-processing spray solvent tools, the Trident SST.
The new tools were sold to one of the industry’s leading manufacturers of RF Power semiconductors where they will be used primarily in photoresist stripping.
“This customer was particularly interested in the advanced Deluge technology used in the new Trident SSTs,” said Win Carpenter, ClassOne’s executive VP. “They are looking forward to these tools providing a faster, more efficient rinse, as well as a reduction.
Utilizing Deluge technology, the Trident SSTs deliver a continuous, uniform cascade of solvent or rinse water instead of using spray nozzles, and this dramatically enhances process performance. The elegant and robust chemical delivery process cuts chemical consumption, shortens process time and can also lower defect counts.
In addition to increasing productivity, the new SSTs also significantly reduce capital expense, since Trident systems are roughly half the cost of competitive spray solvent tools.